We present results on high-performance fully-self-aligned InGaAs InP SHBTs. A transit frequency f(T) = 77 GHz and a maximum oscillation frequency f(max) = 40 GHz at a collector-emitter voltage of V(CE) = 2 V and a collector current of I(C) = 40 mA have been achieved for transistors with an emitter area of 4 x 16-mu-m2. Maximum noise figures of F(min) = 3.5 dB at 2 GHz and F(min) = 5.5 dB at 18 GHz are obtained at I(C) = 1 mA collector current.