FUNDAMENTAL FACTORS GOVERNING IMPROVED PERFORMANCE OF AL-SI/TI MULTILAYER METALLIZATION FOR VERY LARGE-SCALE INTEGRATION

被引：13

作者：

JOSHI, A ^{[1
]}

HU, HS ^{[1
]}

YANEY, DL ^{[1
]}

GARDNER, D ^{[1
]}

SARASWAT, K ^{[1
]}

机构：

[1] STANFORD UNIV,INTEGRATED CIRCUIT LAB,STANFORD,CA 94305

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576085

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1497 / 1503

页数：7

共 28 条

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