PHOTO-LUMINESCENCE ANALYSIS OF ANNEALED SILICON-CRYSTALS

被引：38

作者：

TAJIMA, M ^{[1
]}

KISHINO, S ^{[1
]}

KANAMORI, M ^{[1
]}

IIZUKA, T ^{[1
]}

机构：

[1] VLSI TECHNOL RES ASSOC,COOPERAT LABS,KAWASAKI 213,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 04期

关键词：

D O I：

10.1063/1.327850

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2247 / 2254

页数：8

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