OXIDE BARRIERS ON GAAS BY NEUTRALIZED ION-BEAM SPUTTERING

被引：18

作者：

MEINERS, LG ^{[1
]}

PAN, RP ^{[1
]}

SITES, JR ^{[1
]}

机构：

[1] COLORADO STATE UNIV,DEPT PHYS,FT COLLINS,CO 80523

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 04期

关键词：

D O I：

10.1116/1.569400

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：961 / 963

页数：3

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