PLATINUM SILICIDE FORMATION USING RAPID THERMAL-PROCESSING

被引：47

作者：

NAEM, AA

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 08期

关键词：

D O I：

10.1063/1.341329

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4161 / 4167

页数：7

共 19 条

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