GEXSI1-X OPTICAL DIRECTIONAL COUPLER

被引：9

作者：

MAYER, RA

JUNG, KH

HSIEH, TY

KWONG, DL

CAMPBELL, JC

机构：

来源：

APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 24期

关键词：

D O I：

10.1063/1.104773

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have fabricated and characterized the first Ge(x)Si1-x optical directional couplers. These structures were fabricated from Ge(x)Si1-x grown by rapid thermal processing chemical vapor deposition. The average attenuation of single, straight waveguide sections was 3.3 dB/cm at a wavelength of 1.52-mu-m. For the directional couplers, the coupling coefficient was 3.9 cm-1 for a waveguide separation of 1.5-mu-m.

引用

页码：2744 / 2745

页数：2

共 11 条

[1] CHARACTERISTICS OF TI-DIFFUSED LITHIUM-NIOBATE OPTICAL DIRECTIONAL-COUPLERS
ALFERNESS, RC
SCHMIDT, RV
TURNER, EH
[J]. APPLIED OPTICS, 1979, 18 (23) : 4012 - 4016
[2] AUSTIN MW, 1985, 3RD P EUR C INT OPT, P140
[3] LIMITED REACTION PROCESSING - SILICON EPITAXY
GIBBONS, JF
GRONET, CM
WILLIAMS, KE
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (07) : 721 - 723
[4] HIGH-QUALITY HOMOEPITAXIAL SILICON FILMS DEPOSITED BY RAPID THERMAL CHEMICAL VAPOR-DEPOSITION
GREEN, ML
BRASEN, D
LUFTMAN, H
KANNAN, VC
[J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (06) : 2558 - 2560
[5] RELAXED GEXSI1-X FILMS GROWN BY RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION
JUNG, KH
KIM, YM
KWONG, DL
[J]. APPLIED PHYSICS LETTERS, 1990, 56 (18) : 1775 - 1777
[6] OPTICAL WAVE-GUIDES IN OXYGEN-IMPLANTED BURIED-OXIDE SILICON-ON-INSULATOR STRUCTURES
KURDI, BN
HALL, DG
[J]. OPTICS LETTERS, 1988, 13 (02) : 175 - 177
[7] SILICON EPITAXIAL-GROWTH BY RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION
LEE, SK
KU, YH
KWONG, DL
[J]. APPLIED PHYSICS LETTERS, 1989, 54 (18) : 1775 - 1777
[8] Optical channel waveguides in silicon diffused from GeSi alloy
Schueppert, B.
Schmidtchen, J.
Petermann, K.
[J]. ELECTRONICS LETTERS, 2009, : 27 - 28
[9] SOREF RA, 1989, SPIE P, V1177, P175
[10] LOW-LOSS OPTICAL RIDGE WAVE-GUIDES IN A STRAINED GESI EPITAXIAL LAYER GROWN ON SILICON
SPLETT, A
SCHMIDTCHEN, J
SCHUPPERT, B
PETERMANN, K
KASPER, E
KIBBEL, H
[J]. ELECTRONICS LETTERS, 1990, 26 (14) : 1035 - 1037

← 1 2 →