ANODIC OXIDATION AS SECTIONING TECHNIQUE FOR ANALYSIS OF IMPURITY CONCENTRATION PROFILES IN SILICON

被引：53

作者：

MANARA, A

OSTIDICH, A

PEDROLI, G

RESTELLI, G

机构：

来源：

THIN SOLID FILMS | 1971年 / 8卷 / 05期

关键词：

D O I：

10.1016/0040-6090(71)90084-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：359 / &

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