IMPLANTATION GETTERING OF GOLD IN SILICON

被引：10

作者：

LO, MJT ^{[1
]}

SKALNIK, JG ^{[1
]}

ORDUNG, PF ^{[1
]}

机构：

[1] UNIV CALIF SANTA BARBARA, DEPT ELECT & COMP ENGN, SANTA BARBARA, CA 93106 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 07期

关键词：

D O I：

10.1149/1.2127684

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1569 / 1573

页数：5

共 13 条

[1]

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