GROWTH OF ZNS AND ZNCDSSE ALLOYS ON GAP USING AN ELEMENTAL SULFUR SOURCE BY MOLECULAR-BEAM EPITAXY

被引:25
作者
ICHINO, K
ONISI, T
KAWAKAMI, Y
FUJITA, S
FUJITA, S
机构
[1] Department of Electrical Engineering, Kyoto University, Kyoto
关键词
D O I
10.1016/0022-0248(94)90775-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
MBE growth of ZnS and ZnS-based alloys using an elemental sulfur source is reported. The initial growth process has been investigated by reflection high-energy electron diffraction, and crystalline quality is evaluated by X-ray rocking curve measurement. It is shown that crystalline quality is greatly improved by using ZnS buffer grown at a high substrate temperature. However, the quality of ZnSSe with nearly lattice-matched composition is still not perfect. The results are discussed in terms of relationship between growth process and crystalline quality.
引用
收藏
页码:28 / 34
页数:7
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