DEPTH PROFILING BY SECONDARY ION MASS-SPECTROMETRY

被引:70
作者
ZINNER, E [1 ]
机构
[1] WASHINGTON UNIV,DEPT PHYS,ST LOUIS,MO 63130
关键词
D O I
10.1002/sca.4950030202
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:57 / 78
页数:22
相关论文
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