DIRECT DETERMINATION OF IMPACT IONIZATION QUANTUM YIELD IN SI BY BALLISTIC-ELECTRON-EMISSION MICROSCOPY

被引:24
作者
BAUER, A
LUDEKE, R
机构
[1] IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598
关键词
D O I
10.1103/PhysRevLett.72.928
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Ballistic-electron-emission spectroscopy on Si(111)-(7 x 7) patches in pinholes of thin NiSi2 films on n-type Si(111) reveals collector currents as high as 210% of the tunneling current at a tip bias of 10 V. This electron multiplication is assigned to impact ionization in Si. Its quantum yield up to 7 eV kinetic energy is extracted from the spectra and compared to recent theoretical results.
引用
收藏
页码:928 / 931
页数:4
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