MICROPORE DENSITY IN A-SI-H AND A-SI-H-CL FILMS

被引：2

作者：

DANESH, P ^{[1
]}

PANTCHEV, B ^{[1
]}

机构：

[1] BULGARIAN ACAD SCI,INST SOLID STATE PHYS,BU-1784 SOFIA,BULGARIA

来源：

MATERIALS LETTERS | 1987年 / 6卷 / 03期

关键词：

MICROPORES - POROSITY - SILANE-CONTAINING GAS MIXTURES;

D O I：

10.1016/0167-577X(87)90041-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：89 / 91

页数：3

共 7 条

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[2]

DANESH P, IN PRESS SOLAR ENERG

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[5] MICROSTRUCTURE AND PROPERTIES OF RF-SPUTTERED AMORPHOUS HYDROGENATED SILICON FILMS [J].

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MESSIER, R .

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[6] A DOPING-PRECIPITATED MORPHOLOGY IN PLASMA-DEPOSITED A-SI-H [J].

SCHIFF, EA ;

PERSANS, PD ;

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AKOPYAN, V .

APPLIED PHYSICS LETTERS, 1981, 38 (02) :92-94

[7] OXIDATION AND INTERFACE STATES IN A-SI-H [J].

STREET, RA ;

KNIGHTS, JC .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 43 (06) :1091-1098

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