SOFT-X-RAY SPECTROSCOPIC ANALYSIS OF NI-SILICIDES

被引:8
作者
NAKAMURA, H
HIRAI, M
KUSAKA, M
IWAMI, M
WATABE, H
机构
[1] OKAYAMA UNIV,FAC SCI,SURFACE SCI RES LAB,OKAYAMA 700,JAPAN
[2] MATSUSHITA ELECT IND CO LTD,CHUO KU,OSAKA 540,JAPAN
关键词
VALENCE BAND ELECTRONIC STRUCTURE; SI S-DENSITY OF STATE; SOFT X-RAY EMISSION SPECTROSCOPY; NI-SILICIDE; EXPERIMENT;
D O I
10.1143/JPSJ.61.616
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The valence-band electronic structure of Ni-silicide system, NiSi2, NiSi and Ni2Si, has been studied by measuring soft X-ray Si L2,3 emission spectra. It is found that the Si L2,3 spectra show very different spectral features among these three silicides. The spectra of silicides are compared with the theoretical density of states and discussion is given on the electronic structure of these silicides. It is suggested that Si electronic state contributes significantly to the upper part of valence-band of the three silicide systems.
引用
收藏
页码:616 / 620
页数:5
相关论文
共 16 条
[1]   CORRELATION-EFFECTS IN VALENCE-BAND SPECTRA OF NICKEL SILICIDES [J].
BISI, O ;
CALANDRA, C ;
DELPENNINO, U ;
SASSAROLI, P ;
VALERI, S .
PHYSICAL REVIEW B, 1984, 30 (10) :5696-5703
[2]   ELECTRONIC-STRUCTURE OF NICKEL SILICIDES NI2SI, NISI, AND NISI2 [J].
FRANCIOSI, A ;
WEAVER, JH ;
SCHMIDT, FA .
PHYSICAL REVIEW B, 1982, 26 (02) :546-553
[3]   CONTRIBUTION OF THE SI-S ELECTRONIC STATE TO THE DENSITY OF STATE OF COSI2 AT FERMI ENERGY BY SOFT-X-RAY EMISSION-SPECTROSCOPY [J].
IWAMI, M ;
NAKAMURA, H ;
HIRAI, M ;
KUSAKA, M ;
AZUMA, Y ;
AKAO, F .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (03) :L470-L472
[4]   A NEW APPLICATION OF SOFT-X-RAY SPECTROSCOPY TO A NON-DESTRUCTIVE ANALYSIS OF A FILM SUBSTRATE CONTACT SYSTEM - CARBONIZED-LAYER (ULTRA-THIN-FILM) SI(100) [J].
IWAMI, M ;
KUSAKA, M ;
HIRAI, M ;
NAKAMURA, H ;
SHIBAHARA, K ;
MATSUNAMI, H .
SURFACE SCIENCE, 1988, 199 (03) :467-475
[5]   LOCAL PARTIAL DENSITIES OF STATES IN NI AND CO SILICIDES STUDIED BY SOFT-X-RAY-EMISSION SPECTROSCOPY [J].
JIA, JJ ;
CALLCOTT, TA ;
OBRIEN, WL ;
DONG, QY ;
RUBENSSON, JE ;
MUELLER, DR ;
EDERER, DL ;
ROWE, JE .
PHYSICAL REVIEW B, 1991, 43 (06) :4863-4870
[6]   NI ON SI - INTERFACIAL COMPOUND FORMATION AND ELECTRONIC-STRUCTURE [J].
KOBAYASHI, KLI ;
SUGAKI, S ;
ISHIZAKA, A ;
SHIRAKI, Y ;
DAIMON, H ;
MURATA, Y .
PHYSICAL REVIEW B, 1982, 25 (02) :1377-1380
[7]   CORRELATION OF SCHOTTKY-BARRIER HEIGHT AND MICROSTRUCTURE IN THE EPITAXIAL NI SILICIDE ON SI(111) [J].
LIEHR, M ;
SCHMID, PE ;
LEGOUES, FK ;
HO, PS .
PHYSICAL REVIEW LETTERS, 1985, 54 (19) :2139-2142
[8]   VALENCE-BAND ELECTRONIC-STRUCTURE OF NISI2 AND COSI2 - EVIDENCE OF THE SI S-ELECTRONIC STATE AT THE FERMI EDGE [J].
NAKAMURA, H ;
IWAMI, M ;
HIRAI, M ;
KUSAKA, M ;
AKAO, F ;
WATABE, H .
PHYSICAL REVIEW B, 1990, 41 (17) :12092-12095
[9]   MICROSCOPIC PROPERTIES AND BEHAVIOR OF SILICIDE INTERFACES [J].
RUBLOFF, GW .
SURFACE SCIENCE, 1983, 132 (1-3) :268-314
[10]   THE ELECTRONIC-STRUCTURE OF NIAL AND NISI [J].
SARMA, DD ;
SPEIER, W ;
ZELLER, R ;
VANLEUKEN, E ;
DEGROOT, RA ;
FUGGLE, JC .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1989, 1 (46) :9131-9139