ION-BOMBARDMENT EFFECTS ON ELEMENTAL INCORPORATION PROBABILITIES DURING SPUTTER DEPOSITION OF GASB AND INSB

被引：10

作者：

ELTOUKHY, AH

BARNETT, SA

GREENE, JE

机构：

[1] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801

[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期

关键词：

D O I：

10.1116/1.569938

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：321 / 323

页数：3

共 22 条

[1] SYNTHESIS OF STOICHIOMETRIC INSB THIN-FILMS BY A SIMPLE MOLECULAR-BEAM TECHNIQUE
BABA, S
HORITA, H
KINBARA, A
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (06) : 3632 - 3633
[2] EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THICK METAL AND CERAMIC DEPOSITS
BLAND, RD
KOMINIAK, GJ
MATTOX, DM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 671 - 674
[3] VARIABLE COMPOSITION THIN-FILMS IN TERNARY CHALCOGENIDE SYSTEMS BY RF COSPUTTERING
BOLKER, BFT
SIDLES, PH
DANIELSON, GC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 114 - 116
[4] COLBY JW, UNPUBLISHED
[5] INFLUENCE OF BIAS ON DEPOSITION OF METALLIC-FILMS IN RF AND DC SPUTTERING
CUOMO, JJ
GAMBINO, RJ
ROSENBER.R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 34 - 40
[6] INTERLAYER DIFFUSION IN INSB-GASB SUPERLATTICE STRUCTURE GROWN BY MULTITARGET RF SPUTTERING
ELTOUKHY, AH
ZILKO, JL
WICKERSHAM, CE
GREENE, JE
[J]. APPLIED PHYSICS LETTERS, 1977, 31 (03) : 156 - 158
[7] ION-BOMBARDMENT-ENHANCED DIFFUSION DURING GROWTH OF SPUTTERED SUPER-LATTICE THIN-FILMS
ELTOUKHY, AH
GREENE, JE
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (04) : 343 - 345
[8] ELTOUKHY AH, UNPUBLISHED
[9] STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF INSB THIN-FILMS GROWN BY RF SPUTTERING
GREENE, JE
WICKERSHAM, CE
[J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (08) : 3630 - 3639
[10] EPITAXIAL-GROWTH OF IN1-X GAX SB THIN-FILMS BY MULTITARGET RF SPUTTERING
GREENE, JE
WICKERSHAM, CE
ZILKO, JL
[J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (06) : 2289 - 2297

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