SCANNING TUNNELING MICROSCOPY OF GAAS-ON-INP HETEROEPITAXIAL GROWTH

被引:5
作者
OHKOUCHI, S
TANAKA, I
机构
[1] Optoelectronics Technology Research Laboratory (OTL), Tsukuba, Ibaraki, 300-26, 5-5, Tohkadai
关键词
D O I
10.1016/0304-3991(92)90356-O
中图分类号
TH742 [显微镜];
学科分类号
摘要
The initial stages of GaAs growth on an InP substrate were investigated with an ultra-high-vacuum scanning tunneling microscope (UHV-STM) equipped with a molecular beam epitaxy facility. First, we observed an STM image of an InP surface thermally cleaned under an arsenic flux. The image exhibits 1.6 nm periodic lines of 0.4 nm width along the [110] direction. Next, a few monolayers (ML's) of GaAs-deposited InP surfaces were observed by STM. When less than 2 ML of GaAs was deposited, two-dimensional growth was observed. On the other hand, island formation was observed for more than 2.5 ML of GaAs deposition.
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页码:771 / 775
页数:5
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