SCANNING TUNNELING MICROSCOPY OF THERMALLY CLEANED INP SURFACES IN AN ARSENIC FLUX

被引:12
作者
TANAKA, I
OHKOUCHI, S
OSAKA, F
KATO, T
机构
[1] Optoelectronics Technology Research, Lab, Tsukuba, Japan
关键词
Microscopic Examination - Scanning Electron Microscopy - Surfaces - Cleaning - Surfaces - Microscopic Examination;
D O I
10.1016/0039-6028(92)91118-U
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Thermally cleaned InP surfaces in an arsenic flux have been observed using an ultra-high-vacuum scanning tunneling microscope (UHV-STM). The STM image of the reconstructed In-stabilized surface showed 1.6 nm periodic lines in the [110] direction. The width of these lines was about 0.8 nm, each line comprising two rows when the sample was heated at 510-degrees-C for about one minute in an arsenic flux. On the other hand, the lines were about 0.4 nm wide and comprised a single row when the sample was heated at a higher temperature for a longer time. This result suggest that the In-stabilized surface comprises one or two In-In dimers and missing dimers per 4 x 2 cell, and that the dimer density depends on the cleaning conditions. For samples annealed at 480-degrees-C in a vacuum of 10(-5) Pa for about ten minutes after cleaning, the surface image showed 4 x 2 In-stabilized domains and 2 x 4 As-stabilized domains. This structure is thought to be formed by a desorption of surface atoms during annealing.
引用
收藏
页码:191 / 194
页数:4
相关论文
共 6 条
[1]   GAAS-MESFETS FABRICATED ON INP SUBSTRATES [J].
ASANO, K ;
KASAHARA, K ;
ITOH, T .
IEEE ELECTRON DEVICE LETTERS, 1987, 8 (07) :289-290
[2]   MOLECULAR-BEAM EPITAXIAL-GROWTH OF UNIFORM IN0.53GA0.47AS ON INP WITH A COAXIAL IN-GA OVEN [J].
CHENG, KY ;
CHO, AY ;
WAGNER, WR ;
BONNER, WA .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (02) :1015-1021
[3]   REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION CHARACTERISTIC ABSENCES IN GAAS(100) (2X4)-AS - A TOOL FOR DETERMINING THE SURFACE STOICHIOMETRY [J].
FARRELL, HH ;
PALMSTROM, CJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (04) :903-907
[4]   OBSERVATION OF THE INP SURFACE THERMALLY CLEANED IN AN ARSENIC FLUX USING A SCANNING TUNNELING MICROSCOPE [J].
OHKOUCHI, S ;
TANAKA, I .
APPLIED PHYSICS LETTERS, 1991, 59 (13) :1588-1590
[5]   LONG-WAVELENGTH PINFET RECEIVER OEIC ON A GAAS-ON-INP HETEROSTRUCTURE [J].
SUZUKI, A ;
ITOH, T ;
TERAKADO, T ;
KASAHARA, K ;
ASANO, K ;
INOMOTO, Y ;
ISHIHARA, H ;
TORIKAI, T ;
FUJITA, S .
ELECTRONICS LETTERS, 1987, 23 (18) :954-955
[6]   SCANNING TUNNELING MICROSCOPY OF MOLECULAR-BEAM EPITAXIALLY GROWN GAAS(001) SURFACES [J].
TANAKA, I ;
OHKOUCHI, S ;
KATO, T ;
OSAKA, F .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (04) :2277-2281