INSITU OBSERVATION ON ELECTRON-BEAM INDUCED CHEMICAL VAPOR-DEPOSITION BY TRANSMISSION ELECTRON-MICROSCOPY

被引：44

作者：

ICHIHASHI, T

MATSUI, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584190

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：1869 / 1872

页数：4

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