FABRICATION-RELATED EFFECTS IN METAL-ZNO-SIO2-SI STRUCTURES

被引：7

作者：

CORNELL, ME ^{[1
]}

ELLIOTT, JK ^{[1
]}

GUNSHOR, RL ^{[1
]}

PIERRET, RF ^{[1
]}

机构：

[1] PURDUE UNIV,SCH ELECT ENGN,W LAFAYETTE,IN 47907

来源：

APPLIED PHYSICS LETTERS | 1977年 / 31卷 / 09期

关键词：

D O I：

10.1063/1.89806

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：560 / 562

页数：3

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