MODIFICATION OF SIO THROUGH ROOM-TEMPERATURE PLASMA TREATMENTS, RAPID THERMAL ANNEALINGS, AND LASER IRRADIATION IN A NONOXIDIZING ATMOSPHERE

被引：130

作者：

ROCHET, F

DUFOUR, G

ROULET, H

PELLOIE, B

PERRIERE, J

FOGARASSY, E

SLAOUI, A

FROMENT, M

机构：

[1] UNIV PIERRE & MARIE CURIE,CHIM PHYS LAB,F-75231 PARIS 05,FRANCE

[2] CTR RECH NUCL,PHASE LAB,F-67037 STRASBOURG,FRANCE

来源：

PHYSICAL REVIEW B | 1988年 / 37卷 / 11期

关键词：

D O I：

10.1103/PhysRevB.37.6468

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：6468 / 6477

页数：10

共 33 条

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