NOVEL TRIPLE-LAYER RESIST SYSTEM

被引：7

作者：

TODOKORO, Y

机构：

来源：

关键词：

D O I：

10.1049/el:19820368

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：543 / 544

页数：2

共 7 条

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HATZAKIS, M .

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[2] SILICON TRANSFER LAYER FOR MULTILAYER RESIST SYSTEMS [J].

KRUGER, JB ;

RISSMAN, P ;

CHANG, MS .

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LIN, BJ ;

CHANG, THP .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1669-1671

[4] HIGH-RESOLUTION, STEEP PROFILE, RESIST PATTERNS [J].

MORAN, JM ;

MAYDAN, D .

BELL SYSTEM TECHNICAL JOURNAL, 1979, 58 (05) :1027-1036

TAI, KL ;

SINCLAIR, WR ;

VADIMSKY, RG ;

MORAN, JM ;

RAND, MJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1977-1979

[6]

Todokoro Y., 1982, Transactions of the Institute of Electronics and Communication Engineers of Japan, Section E (English), VE65, P23

TODOKORO, Y .