CORRELATION OF REFRACTIVE-INDEX AND SILICON CONTENT OF SILICON OXYNITRIDE FILMS

被引：26

作者：

KNOLLE, WR

机构：

[1] AT&T Bell Lab, United States

来源：

THIN SOLID FILMS | 1989年 / 168卷 / 01期

关键词：

Refractive Index - Silicon Oxynitride;

D O I：

10.1016/0040-6090(89)90695-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：123 / 132

页数：10

共 19 条

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