GROWTH AND ANALYSIS OF QUANTUM-WELL STRUCTURES

被引:30
作者
GRUTZMACHER, D
机构
[1] Institute of Semiconductor Electronics, Technical University Aachen
关键词
VAPOR-PHASE EPITAXY; MOLECULAR-BEAM EPITAXY; ATOMIC STEPS; OPTICAL-PROPERTIES; ELECTRON-MOBILITY; RECOMBINATION; PHOTOLUMINESCENCE; SUPERLATTICES; DEPENDENCE; DEPOSITION;
D O I
10.1016/0022-0248(91)90515-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The interfacial structure of lattice matched MOVPE grown GaInAs/InP is discussed and, in addition, also that of MBE grown GaAs/AlGaAs quantum well structures. Characterization methods providing information from the interfaces on an atomic scale: TEM, X-ray diffractometry and PL, are reviewed in detial. It is shown that compositional grading cannot readily be distinguished from atomic steps at the interfaces by TEM or X-ray diffractometry. PL strongly indicates the presence of atomic steps but additional grading may occur. However, the data obtained by by combining these methods in a more comprehensive investigation using the switching sequences and the growth time per well as parameters permit identification of interfacial details and growth mechanisms in quantum wells otherwise not attainable.
引用
收藏
页码:520 / 530
页数:11
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