共 20 条
[1]
AIZAKI N, 1985, 17TH C SOL STAT DEV, P297
[2]
BORON DOPING OF SI MOLECULAR-BEAM EPITAXY LAYERS - A NEW HIGH-TEMPERATURE EFFUSION CELL
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (03)
:835-841
[5]
EAVES L, 1986, PHYSICS FABRICATION
[6]
HONIG RE, 1969, RCA REV, V30, P285
[10]
ENHANCED STICKING COEFFICIENTS AND IMPROVED PROFILE CONTROL USING BORON AND ANTIMONY AS COEVAPORATED DOPANTS IN SI-MBE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (02)
:592-595