SOME OBSERVATIONS ON DISLOCATION ETCHING OF GAAS1-XPX EPITAXIAL LAYERS

被引:8
作者
STEWART, CEE
机构
关键词
D O I
10.1016/0022-0248(71)90068-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:269 / &
相关论文
共 8 条
[1]   ETCHING OF DISLOCATIONS ON LOW-INDEX FACES OF GAAS [J].
ABRAHAMS, MS ;
BUIOCCHI, CJ .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (09) :2855-&
[2]   DISLOCATION ETCH PITS IN GAAS [J].
ABRAHAMS, MS .
JOURNAL OF APPLIED PHYSICS, 1964, 35 (12) :3626-&
[3]   DISLOCATION MORPHOLOGY IN GRADED HETEROJUNCTIONS - GAAS1-XPX [J].
ABRAHAMS, MS ;
WEISBERG, LR ;
BUIOCCHI, CJ ;
BLANC, J .
JOURNAL OF MATERIALS SCIENCE, 1969, 4 (03) :223-&
[4]   COMPOSITIONAL INHOMOGENEITIES IN GAAS1-XPX ALLOY EPITAXIAL LAYERS [J].
EWING, RE ;
SMITH, DK .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (13) :5943-&
[5]   DISLOCATIONS AND THEIR RELATION TO IRREGULARITIES IN ZINC-DIFFUSED GAASP P-N JUNCTIONS [J].
GRENNING, DA ;
HERZOG, AH .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) :2783-+
[6]   ETCH PITS IN GALLIUM ARSENIDE [J].
RICHARDS, JL ;
CROCKER, AJ .
JOURNAL OF APPLIED PHYSICS, 1960, 31 (03) :611-612
[7]   PREPARATION AND PROPERTIES OF VAPOR-DEPOSITED EPITAXIAL GAAS1-XPX USING ARSINE AND PHOSPHINE [J].
TIETJEN, JJ ;
AMICK, JA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (07) :724-&
[8]  
WILLIAMS FV, 1967, T METALL SOC AIME, V239, P702