THE EFFECT OF TARGET POWER ON THE NITROGEN PARTIAL-PRESSURE LEVEL AND HARDNESS OF REACTIVELY SPUTTERED TITANIUM NITRIDE COATINGS

被引：67

作者：

SPROUL, WD ^{[1
]}

RUDNIK, PJ ^{[1
]}

GOGOL, CA ^{[1
]}

机构：

[1] LEYBOLD INFICON INC,E SYRACUSE,NY 13057

来源：

THIN SOLID FILMS | 1989年 / 171卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90042-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：171 / 181

页数：11

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