OXIDATION OF TANTALUM DISILICIDE POLYCRYSTALLINE SILICON STRUCTURES IN DRY O-2

被引：22

作者：

RAZOUK, RR

THOMAS, ME

PRESSACCO, SL

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 07期

关键词：

D O I：

10.1063/1.329884

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5342 / 5344

页数：3

共 11 条

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