3-DIMENSIONAL LASER DIRECT WRITING OF ELECTRICALLY CONDUCTING AND ISOLATING MICROSTRUCTURES

被引：41

作者：

LEHMANN, O

STUKE, M

机构：

[1] Max-Planck-Institut für biophysikalische Chemie, D-37018 Göttingen

来源：

MATERIALS LETTERS | 1994年 / 21卷 / 02期

关键词：

D O I：

10.1016/0167-577X(94)90206-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

By laser chemical vapor deposition (LCVD) from a mixture of trimethylamine alane and oxygen on N2O, transparent aluminum oxide rods can be generated with a high linear growth rate of up to 80 mum/s. Using a two-beam setup, a three-dimensional laser direct write method was developed that permits the direct one-step growth of complex free-standing micro-objects with a resolution down to 3 mum. By subsequent laser metallization of structure parts, electrical conduction properties can be changed from isolating to conducting.

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页码：131 / 136

页数：6

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