CHAMBER MATERIAL EFFECTS ON ACTINOMETRIC MEASUREMENTS IN RF GLOW-DISCHARGES

被引：6

作者：

COTLER, TJ

PASSOW, ML

FOURNIER, JP

BRAKE, ML

ELTA, ME

机构：

[1] UNIV MICHIGAN,DEPT NUCL ENGN,ANN ARBOR,MI 48109

[2] UNIV MICHIGAN,DEPT ELECT ENGN & COMP SCI,SOLID STATE ELECTR LAB,ANN ARBOR,MI 48109

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 69卷 / 05期

关键词：

D O I：

10.1063/1.348597

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The relative concentration of atomic fluroine was measured in a CF4 rf glow discharge using the actinometric technique. The dependence of fluorine concentration on power, pressure and flow are presented and shown to be dependent upon reactor wall material and electrode material.

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收藏

页码：2885 / 2888

页数：4

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