ELECTRICAL CHARACTERISTICS OF METAL-INSULATOR-SEMICONDUCTOR DIODES WITH ZRO2/SIO2 DIELECTRIC FILMS

被引:33
作者
FUKUMOTO, H
MORITA, M
OSAKA, Y
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D O I
10.1063/1.343155
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O59 [应用物理学];
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页码:5210 / 5212
页数:3
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