REACTIVE EVAPORATION OF THIN TITANIUM NITRIDE FILMS IN ULTRAHIGH-VACUUM AND THEIR FRICTION AND WEAR BEHAVIOR AS A FUNCTION OF CONTACT STRESS

被引：20

作者：

PEEBLES, DE

POPE, LE

机构：

来源：

THIN SOLID FILMS | 1989年 / 173卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90534-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：19 / 37

页数：19

共 35 条

[1] PROCESSES OF THE ACTIVATED REACTIVE EVAPORATION TYPE AND THEIR TRIBOLOGICAL APPLICATIONS [J].

BUNSHAH, RF .

THIN SOLID FILMS, 1983, 107 (01) :21-38

[2] A CORRELATION OF AUGER-ELECTRON SPECTROSCOPY, X-RAY PHOTOELECTRON-SPECTROSCOPY, AND RUTHERFORD BACKSCATTERING SPECTROMETRY MEASUREMENTS ON SPUTTER-DEPOSITED TITANIUM NITRIDE THIN-FILMS [J].

BURROW, BJ ;

MORGAN, AE ;

ELLWANGER, RC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2463-2469

[3]

DAVIS LE, 1978, HDB AUGER ELECTRON S

[4] QUANTITATIVE AUGER-ELECTRON ANALYSIS OF TITANIUM NITRIDES [J].

DAWSON, PT ;

TZATZOV, KK .

SURFACE SCIENCE, 1985, 149 (01) :105-118

[5] THE AMORPHOUS PHASE AND SURFACE MECHANICAL-PROPERTIES OF 304-STAINLESS STEEL IMPLANTED WITH TI AND C [J].

FOLLSTAEDT, DM ;

YOST, FG ;

POPE, LE ;

PICRAUX, ST ;

KNAPP, JA .

APPLIED PHYSICS LETTERS, 1983, 43 (04) :358-360

[6] INVESTIGATIONS ON MECHANICAL-BEHAVIOR OF BRITTLE WEAR-RESISTANT COATINGS .1. EXPERIMENTAL RESULTS [J].

GILLE, G ;

WETZIG, K .

THIN SOLID FILMS, 1983, 110 (01) :37-54

[7] REVIEW OF STICKING COEFFICIENTS AND SORPTION CAPACITIES OF GASES ON TITANIUM FILMS [J].

HARRA, DJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :471-474

[8] MICROSTRUCTURE EVOLUTION IN TIN FILMS REACTIVELY SPUTTER DEPOSITED ON MULTIPHASE SUBSTRATES [J].

HELMERSSON, U ;

SUNDGREN, JE ;

GREENE, JE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :500-503

[9] ADHESION OF TITANIUM NITRIDE COATINGS ON HIGH-SPEED STEELS [J].

HELMERSSON, U ;

JOHANSSON, BO ;

SUNDGREN, JE ;

HENTZELL, HTG ;

BILLGREN, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :308-315

[10] THIN SOLID FILMS TO COMBAT FRICTION, WEAR, AND CORROSION [J].

HINTERMANN, HE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04) :816-822

← 1 2 3 4 →