COMPOSITION CHANGES IN SPUTTER DEPOSITION OF Y-BA-CU-O FILMS

被引：2

作者：

HOSHI, Y ^{[1
]}

NAOE, M ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,MEGURO KU,TOKYO 152,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1989年 / 25卷 / 05期

关键词：

D O I：

10.1109/20.42353

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3518 / 3520

页数：3

共 7 条

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