LASER BILAYER ETCHING OF GAAS-SURFACES

被引：66

作者：

MAKI, PA

EHRLICH, DJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 02期

关键词：

D O I：

10.1063/1.102097

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：91 / 94

页数：4

共 17 条

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