MACROSCOPIC THEORY OF PULSED-LASER ANNEALING .2. DOPANT DIFFUSION AND SEGREGATION

被引：112

作者：

WOOD, RF

KIRKPATRICK, JR

GILES, GE

机构：

来源：

PHYSICAL REVIEW B | 1981年 / 23卷 / 10期

关键词：

D O I：

10.1103/PhysRevB.23.5555

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：5555 / 5569

页数：15

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