ORIGIN AND PROPERTIES OF INTERFACE STATES AT INSULATOR SEMICONDUCTOR AND SEMICONDUCTOR SEMICONDUCTOR INTERFACES OF COMPOUND SEMICONDUCTORS

被引:16
作者
HASEGAWA, H
OHNO, H
ISHII, H
HAGA, T
ABE, Y
TAKAHASHI, H
机构
[1] HOKKAIDO UNIV, FAC ENGN, DEPT NUCL ENGN, SAPPORO, HOKKAIDO 060, JAPAN
[2] HOKKAIDO UNIV, FAC ENGN, DEPT MET ENGN, SAPPORO, HOKKAIDO 060, JAPAN
关键词
D O I
10.1016/0169-4332(89)90087-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Electrical characterization reveals several salient common electronic features of insulator-semiconductor (I-S) and semiconductor-semiconductor (S-S) interfaces. Currently available models on the origin of states (defect model, DIGS model, effective workfunction model) are compared in their capabilities of explaining these features. The DIGS (disorder-induced gap state) model is shown to possess maximum capability and consistency. Study of the microstructure of interface by cross-sectional TEM and RBS techniques revealed a strong correlation between lattice disorder and interface state density, and supports the DIGS model. © 1989.
引用
收藏
页码:372 / 382
页数:11
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