INTERFACE STATE GENERATION UNDER LONG-TERM POSITIVE-BIAS TEMPERATURE STRESS FOR A P+ POLY GATE MOS STRUCTURE

被引:24
作者
HIRUTA, Y
IWAI, H
MATSUOKA, F
HAMA, K
MAEGUCHI, K
KANZAKI, K
机构
[1] TOSHIBA MICROELECTR CORP,KAWASAKI 210,JAPAN
[2] TOSHIBA CO LTD,DIV SEMICOND,KAWASAKI 210,JAPAN
关键词
D O I
10.1109/16.34236
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1732 / 1739
页数:8
相关论文
共 33 条
[1]   DESCRIPTION OF SIO2-SI INTERFACE PROPERTIES BY MEANS OF VERY LOW FREQUENCY MOS CAPACITANCE MEASUREMENTS [J].
CASTAGNE, R ;
VAPAILLE, A .
SURFACE SCIENCE, 1971, 28 (01) :157-+
[2]  
FICHETTI MV, 1985, J APPL PHYS, V57, P418
[3]  
Fischetti M. V., 1986, Insulating Films on Semiconductors. Proceedings of the International Conference INFOS 85, P181
[4]   CHARACTERIZATION OF THE HEAVILY (NONDEGENERATE) BORON-DOPED SI-SIO2 INTERFACE [J].
GHANNAM, MY .
SOLID-STATE ELECTRONICS, 1987, 30 (11) :1147-1152
[5]   THE INFLUENCE OF MOBILE IONS ON THE SI-SIO2 INTERFACE TRAPS [J].
HILLEN, MW ;
HEMMES, DG .
SOLID-STATE ELECTRONICS, 1981, 24 (08) :773-780
[6]  
HILLEN MW, 1986, INSTABILITIES SILICO, P403
[7]  
Hillenius S. J., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P252
[8]  
Hiruta Y., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P718
[9]   RELIABILITY OF 6-10 NM THERMAL SIO2-FILMS SHOWING INTRINSIC DIELECTRIC INTEGRITY [J].
HOKARI, Y ;
BABA, T ;
KAWAMURA, N .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (11) :2485-2491
[10]   ULTRA-THIN SILICON-DIOXIDE BREAKDOWN CHARACTERISTICS OF MOS DEVICES WITH N+ AND P+ POLYSILICON GATES [J].
HOLLAND, S ;
CHEN, IC ;
HU, CM .
IEEE ELECTRON DEVICE LETTERS, 1987, 8 (12) :572-575