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MICROSTRUCTURAL CHARACTERIZATION OF PATTERNED GALLIUM-ARSENIDE GROWN ON (001) SILICON SUBSTRATES
被引:23
作者
:
MATYI, RJ
论文数:
0
引用数:
0
h-index:
0
MATYI, RJ
SHICHIJO, H
论文数:
0
引用数:
0
h-index:
0
SHICHIJO, H
MOORE, TM
论文数:
0
引用数:
0
h-index:
0
MOORE, TM
TSAI, HL
论文数:
0
引用数:
0
h-index:
0
TSAI, HL
机构
:
来源
:
APPLIED PHYSICS LETTERS
|
1987年
/ 51卷
/ 01期
关键词
:
D O I
:
10.1063/1.98890
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:18 / 20
页数:3
相关论文
共 9 条
[1]
GAAS PLANAR TECHNOLOGY BY MOLECULAR-BEAM EPITAXY (MBE)
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
CHO, AY
BALLAMY, WC
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BALLAMY, WC
[J].
JOURNAL OF APPLIED PHYSICS,
1975,
46
(02)
: 783
-
785
[2]
MONOLITHIC INTEGRATION OF SI MOSFETS AND GAAS-MESFETS
CHOI, HK
论文数:
0
引用数:
0
h-index:
0
CHOI, HK
TURNER, GW
论文数:
0
引用数:
0
h-index:
0
TURNER, GW
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
TSAUR, BY
[J].
IEEE ELECTRON DEVICE LETTERS,
1986,
7
(04)
: 241
-
243
[3]
CHOI HK, 1986, MAT RES SOC S P, V67, P165
[4]
FAN JCC, 1986, MRS S P, V67
[5]
ELECTRON CHANNELING PATTERNS IN THE SCANNING ELECTRON-MICROSCOPE
JOY, DC
论文数:
0
引用数:
0
h-index:
0
机构:
NBS, WASHINGTON, DC 20234 USA
JOY, DC
NEWBURY, DE
论文数:
0
引用数:
0
h-index:
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机构:
NBS, WASHINGTON, DC 20234 USA
NEWBURY, DE
DAVIDSON, DL
论文数:
0
引用数:
0
h-index:
0
机构:
NBS, WASHINGTON, DC 20234 USA
DAVIDSON, DL
[J].
JOURNAL OF APPLIED PHYSICS,
1982,
53
(08)
: R81
-
R122
[6]
DEFECT REDUCTION BY THERMAL ANNEALING OF GAAS-LAYERS GROWN BY MOLECULAR-BEAM EPITAXY ON SI SUBSTRATES
LEE, JW
论文数:
0
引用数:
0
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LEE, JW
SHICHIJO, H
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0
引用数:
0
h-index:
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SHICHIJO, H
TSAI, HL
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0
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0
h-index:
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TSAI, HL
MATYI, RJ
论文数:
0
引用数:
0
h-index:
0
MATYI, RJ
[J].
APPLIED PHYSICS LETTERS,
1987,
50
(01)
: 31
-
33
[7]
ASPECTS OF GAAS SELECTIVE AREA GROWTH BY MOLECULAR-BEAM EPITAXY WITH PATTERNING BY SIO2 MASKING
LI, AZ
论文数:
0
引用数:
0
h-index:
0
机构:
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
LI, AZ
CHENG, H
论文数:
0
引用数:
0
h-index:
0
机构:
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
CHENG, H
MILNES, AG
论文数:
0
引用数:
0
h-index:
0
机构:
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
MILNES, AG
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1983,
130
(10)
: 2072
-
2075
[8]
GROWTH AND PATTERNING OF GAAS/GE SINGLE-CRYSTAL LAYERS ON SI SUBSTRATES BY MOLECULAR-BEAM EPITAXY
SHELDON, P
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
SHELDON, P
JONES, KM
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
JONES, KM
HAYES, RE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
HAYES, RE
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
TSAUR, BY
FAN, JCC
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0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
FAN, JCC
[J].
APPLIED PHYSICS LETTERS,
1984,
45
(03)
: 274
-
276
[9]
LOW-DISLOCATION-DENSITY GAAS EPILAYERS GROWN ON GE-COATED SI SUBSTRATES BY MEANS OF LATERAL EPITAXIAL OVERGROWTH
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
TSAUR, BY
MCCLELLAND, RW
论文数:
0
引用数:
0
h-index:
0
MCCLELLAND, RW
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
FAN, JCC
GALE, RP
论文数:
0
引用数:
0
h-index:
0
GALE, RP
SALERNO, JP
论文数:
0
引用数:
0
h-index:
0
SALERNO, JP
VOJAK, BA
论文数:
0
引用数:
0
h-index:
0
VOJAK, BA
BOZLER, CO
论文数:
0
引用数:
0
h-index:
0
BOZLER, CO
[J].
APPLIED PHYSICS LETTERS,
1982,
41
(04)
: 347
-
349
←
1
→
共 9 条
[1]
GAAS PLANAR TECHNOLOGY BY MOLECULAR-BEAM EPITAXY (MBE)
CHO, AY
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
CHO, AY
BALLAMY, WC
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BALLAMY, WC
[J].
JOURNAL OF APPLIED PHYSICS,
1975,
46
(02)
: 783
-
785
[2]
MONOLITHIC INTEGRATION OF SI MOSFETS AND GAAS-MESFETS
CHOI, HK
论文数:
0
引用数:
0
h-index:
0
CHOI, HK
TURNER, GW
论文数:
0
引用数:
0
h-index:
0
TURNER, GW
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
TSAUR, BY
[J].
IEEE ELECTRON DEVICE LETTERS,
1986,
7
(04)
: 241
-
243
[3]
CHOI HK, 1986, MAT RES SOC S P, V67, P165
[4]
FAN JCC, 1986, MRS S P, V67
[5]
ELECTRON CHANNELING PATTERNS IN THE SCANNING ELECTRON-MICROSCOPE
JOY, DC
论文数:
0
引用数:
0
h-index:
0
机构:
NBS, WASHINGTON, DC 20234 USA
JOY, DC
NEWBURY, DE
论文数:
0
引用数:
0
h-index:
0
机构:
NBS, WASHINGTON, DC 20234 USA
NEWBURY, DE
DAVIDSON, DL
论文数:
0
引用数:
0
h-index:
0
机构:
NBS, WASHINGTON, DC 20234 USA
DAVIDSON, DL
[J].
JOURNAL OF APPLIED PHYSICS,
1982,
53
(08)
: R81
-
R122
[6]
DEFECT REDUCTION BY THERMAL ANNEALING OF GAAS-LAYERS GROWN BY MOLECULAR-BEAM EPITAXY ON SI SUBSTRATES
LEE, JW
论文数:
0
引用数:
0
h-index:
0
LEE, JW
SHICHIJO, H
论文数:
0
引用数:
0
h-index:
0
SHICHIJO, H
TSAI, HL
论文数:
0
引用数:
0
h-index:
0
TSAI, HL
MATYI, RJ
论文数:
0
引用数:
0
h-index:
0
MATYI, RJ
[J].
APPLIED PHYSICS LETTERS,
1987,
50
(01)
: 31
-
33
[7]
ASPECTS OF GAAS SELECTIVE AREA GROWTH BY MOLECULAR-BEAM EPITAXY WITH PATTERNING BY SIO2 MASKING
LI, AZ
论文数:
0
引用数:
0
h-index:
0
机构:
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
LI, AZ
CHENG, H
论文数:
0
引用数:
0
h-index:
0
机构:
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
CHENG, H
MILNES, AG
论文数:
0
引用数:
0
h-index:
0
机构:
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
CARNEGIE MELLON INST, PITTSBURGH, PA 15213 USA
MILNES, AG
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1983,
130
(10)
: 2072
-
2075
[8]
GROWTH AND PATTERNING OF GAAS/GE SINGLE-CRYSTAL LAYERS ON SI SUBSTRATES BY MOLECULAR-BEAM EPITAXY
SHELDON, P
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
SHELDON, P
JONES, KM
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
JONES, KM
HAYES, RE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
HAYES, RE
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
TSAUR, BY
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV COLORADO, DEPT ELECT ENGN, BOULDER, CO 80309 USA
FAN, JCC
[J].
APPLIED PHYSICS LETTERS,
1984,
45
(03)
: 274
-
276
[9]
LOW-DISLOCATION-DENSITY GAAS EPILAYERS GROWN ON GE-COATED SI SUBSTRATES BY MEANS OF LATERAL EPITAXIAL OVERGROWTH
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
TSAUR, BY
MCCLELLAND, RW
论文数:
0
引用数:
0
h-index:
0
MCCLELLAND, RW
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
FAN, JCC
GALE, RP
论文数:
0
引用数:
0
h-index:
0
GALE, RP
SALERNO, JP
论文数:
0
引用数:
0
h-index:
0
SALERNO, JP
VOJAK, BA
论文数:
0
引用数:
0
h-index:
0
VOJAK, BA
BOZLER, CO
论文数:
0
引用数:
0
h-index:
0
BOZLER, CO
[J].
APPLIED PHYSICS LETTERS,
1982,
41
(04)
: 347
-
349
←
1
→