共 15 条
[3]
ROLE OF METAL-SEMICONDUCTOR INTERFACE IN SILICON INTEGRATED-CIRCUIT TECHNOLOGY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1974, 11 (06)
:972-984
[4]
BOWER RW, 1973, SOLID ST ELECTRON, V16, P14
[8]
HOVEL AJ, 1975, SEMICONDUCTORS SEMIM, V11
[10]
ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1974, 11 (01)
:86-93