PREPARATION AND ELECTRICAL-PROPERTIES OF THIN NATIVE OXIDE DOUBLE-LAYER INSULATOR FILMS ON NORMAL-TYPE INP

被引：4

作者：

BOUCHIKHI, B ^{[1
]}

MICHEL, C ^{[1
]}

RAVELET, S ^{[1
]}

LEPLEY, B ^{[1
]}

机构：

[1] ESE,CTR LORRAIN OPT & ELECTR SOLIDES,F-57078 METZ,FRANCE

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1987年 / 101卷 / 01期

关键词：

D O I：

10.1002/pssa.2211010120

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：173 / 184

页数：12

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