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THE THERMAL AND ION-ASSISTED REACTIONS OF GAAS(100) WITH MOLECULAR CHLORINE
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REACTIVE ION ETCHING OF GAAS USING CCL2F2 AND THE EFFECT OF AR ADDITION
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1983, 1 (04)
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HIGH-RATE MASKED ETCHING OF GAAS BY MAGNETRON ION ETCHING
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1986, 4 (03)
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REACTIVE ION ETCHING OF GAAS IN A CHLORINE PLASMA
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1984, 2 (01)
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LARGE AREA ION-BEAM ASSISTED ETCHING OF GAAS WITH HIGH ETCH RATES AND CONTROLLED ANISOTROPY
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REACTIVE ION ETCHING OF GAAS IN CCL4/H2 AND CCL4/O2
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