IMAGING XPS WITH A HEMISPHERICAL ANALYZER AND MULTICHANNELPLATE DETECTION

被引：8

作者：

EBEL, H

EBEL, MF

MANTLER, M

BARNEGGGOLWIG, G

SVAGERA, R

GURKER, N

机构：

[1] Institut für Angewandte und Technische Physik, Technische Universität Wien, A-1040 Vienna

来源：

SURFACE SCIENCE | 1990年 / 231卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(90)90716-L

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A description of the principle of imaging by means of a combination of hemispherical analyzer with a two dimensional electron detector (multichannelplate) is given together with details on data handling. Examples of applications in the field of pixel-analysis of thin films and of elemental distributions demonstrate new horizons in quantitative XPS. © 1990.

引用

页码：233 / 239

页数：7

共 7 条

[1]

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[2] INFLUENCE OF CONCENTRATION GRADIENTS AND SURFACE-ROUGHNESS ON MEASURED REDUCED THICKNESSES OF OVERLAYERS [J].

EBEL, MF ;

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JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1987, 42 (01) :61-66

[3]

EBEL MF, 1982, Patent No. 371289

[4] IMAGING XPS - A NEW TECHNIQUE .2. EXPERIMENTAL-VERIFICATION [J].

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EBEL, MF ;

EBEL, H ;

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[5] EXPERIMENTS ON IMAGING X-RAY ANALYTICAL METHODS [J].

GURKER, N ;

EBEL, MF ;

EBEL, H ;

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SURFACE AND INTERFACE ANALYSIS, 1989, 14 (04) :163-169

[6] IMAGING XPS - A NEW TECHNIQUE - PRINCIPLES [J].

GURKER, N ;

EBEL, MF ;

EBEL, H .

SURFACE AND INTERFACE ANALYSIS, 1983, 5 (01) :13-19

[7] QUANTITATIVE XPS - MULTILINE APPROACH [J].

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EBEL, H ;

EBEL, MF ;

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HIROKAWA, K .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1986, 40 (03) :241-257

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