INVERTED RESIST MULTILAYER SYSTEM FOR HIGH-DEFINITION PATTERN LITHOGRAPHY

被引：2

作者：

ETRILLARD, J

IZRAEL, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 01期

关键词：

D O I：

10.1116/1.584852

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：100 / 103

页数：4

共 13 条

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