QUANTITATIVE MODEL FOR DIFFUSION OF PHOSPHORUS IN SILICON AND EMITTER DIP EFFECT

被引：314

作者：

FAIR, RB ^{[1
]}

TSAI, JCC ^{[1
]}

机构：

[1] BELL LABS INC,READING,PA 19604

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 07期

关键词：

D O I：

10.1149/1.2133492

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1107 / 1118

页数：12

共 68 条

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