LOW CONCENTRATION DIFFUSION IN SILICON UNDER SEALED TUBE CONDITIONS

被引：21

作者：

GHOSHTAGORE, RN

机构：

来源：

关键词：

D O I：

10.1016/0038-1101(72)90171-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1113 / +

页数：1

共 31 条

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