THEORETICAL AND EXPERIMENTAL INVESTIGATIONS OF CHLORINE RF GLOW-DISCHARGES .2. EXPERIMENTAL

Key plasma properties of a 13.56 MHz chlorine glow discharge were measured using several plasma diagnostic techniques. Electron density and energy, self-sustained electric field, RF current flowing through the plasma, ion bombardment energy, and atomic chlorine concentration were measured as a function of reactor operating conditions. The experimental data were compared to the predictions of a plasma reactor model which included details of the bulk plasma. Good agreement between the measured and predicted values of all the above plasma properties was obtained over a range of pressure, power, and electrode spacing without adjusting any reaction rate coefficients.