CARBON IN EPITAXIAL SILICON

[1] MECHANISM OF INERT GAS CLEANUP IN A GASEOUS DISCHARGE [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (06) : 1017 - 1023

[2] TRIPYRAMIDS AND ASSOCIATED DEFECTS IN EPITAXIAL SILICON LAYERS [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (113): : 1007 - &

[3] IN SITU ETCHING OF SILICON SUBSTRATES PRIOR TO EPITAXIAL GROWTH [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (2P1) : 156 - &

[4] TRIPYRAMID GROWTH OF EPITAXIAL SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (2P1) : 189 - &

[5] LECLAIRE AD, 1957, MR1417 AERE REP

[6] A SPREADING RESISTANCE TECHNIQUE FOR RESISTIVITY MEASUREMENTS ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (03) : 255 - &

[7] FORMATION OF SILICON AND TITANIUM CARBIDES BY CHEMICAL VAPOR DEPOSITION [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1968, 51 (02) : 84 - &

[8] RUNYAN WR, 1965, SILICON SEMICONDUCTO, P253

[9] CONCERNING CARBON CONTENT IN SEMICONDUCTOR SILICON [J]. SOLID-STATE ELECTRONICS, 1965, 8 (09) : 767 - &

[10] SIRTL E, 1961, Z METALLKD, V52, P529

[1] MECHANISM OF INERT GAS CLEANUP IN A GASEOUS DISCHARGE [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (06) : 1017 - 1023

[2] TRIPYRAMIDS AND ASSOCIATED DEFECTS IN EPITAXIAL SILICON LAYERS [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (113): : 1007 - &

[3] IN SITU ETCHING OF SILICON SUBSTRATES PRIOR TO EPITAXIAL GROWTH [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (2P1) : 156 - &

[4] TRIPYRAMID GROWTH OF EPITAXIAL SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (2P1) : 189 - &

[5] LECLAIRE AD, 1957, MR1417 AERE REP

[6] A SPREADING RESISTANCE TECHNIQUE FOR RESISTIVITY MEASUREMENTS ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (03) : 255 - &

[7] FORMATION OF SILICON AND TITANIUM CARBIDES BY CHEMICAL VAPOR DEPOSITION [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1968, 51 (02) : 84 - &

[8] RUNYAN WR, 1965, SILICON SEMICONDUCTO, P253

[9] CONCERNING CARBON CONTENT IN SEMICONDUCTOR SILICON [J]. SOLID-STATE ELECTRONICS, 1965, 8 (09) : 767 - &

[10] SIRTL E, 1961, Z METALLKD, V52, P529