OPTICAL AND MECHANICAL-PROPERTIES OF DC SPUTTERED CARBON-FILMS

被引：49

作者：

RUBIN, M ^{[1
]}

HOPPER, CB ^{[1
]}

CHO, NH ^{[1
]}

BHUSHAN, B ^{[1
]}

机构：

[1] IBM CORP,ALMADEN RES CTR,DIV RES,SAN JOSE,CA 95120

来源：

JOURNAL OF MATERIALS RESEARCH | 1990年 / 5卷 / 11期

基金：

美国能源部;

关键词：

D O I：

10.1557/JMR.1990.2538

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Amorphous carbon films were deposited on glass by dc magnetron sputtering from a graphite target in mixtures of argon and hydrogen. Hydrogen flow and other deposition parameters affected the optical and mechanical properties of these films. Increasing hydrogen content caused the average visible transmittance to vary from 16% to 86% for 500-Å thick films. Maximum compressive stress and hardness occur between 0 and 1% hydrogen flow, resulting in rapid delamination. Low sputtering power moderately increases transmittance and hardness while relieving stress. Transparency is induced in both the high-hydrogen and low-power films by formation of sp3 C-C bonds. In the case of the hydrogenated films, however, a softer polymeric structure is formed. © 1990, Materials Research Society. All rights reserved.

引用

页码：2538 / 2542

页数：5

共 23 条

[1] RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J].