THE EFFECT OF GAS-PHASE GROWTH-PARAMETERS ON THE COMPOSITION OF INGAAS IN THE HYDRIDE VPE PROCESS

被引：9

作者：

BUCKLEY, DN

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1988年 / 17卷 / 01期

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D O I：

10.1007/BF02652226

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：15 / 20

页数：6

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