A COMPARISON OF THE STEP COVERAGE OF ALUMINUM COATINGS PRODUCED BY 2 SPUTTER MAGNETRON SYSTEMS AND A DUAL-BEAM ION SYSTEM

被引：5

作者：

PANITZ, JKG

DRAPER, BL

CURLEE, RM

机构：

来源：

THIN SOLID FILMS | 1988年 / 166卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(88)90365-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：45 / 53

页数：9

共 10 条

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