RADIATION EFFECT DUE TO ENERGETIC OXYGEN-ATOMS ON CONDUCTIVE AL-DOPED ZNO FILMS

被引：101

作者：

TOMINAGA, K

KURODA, K

TADA, O

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 07期

关键词：

D O I：

10.1143/JJAP.27.1176

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1176 / 1180

页数：5

共 13 条

[1] STRUCTURES AND ELECTRICAL PROPERTIES OF ZINC OXIDE FILMS PREPARED BY LOW PRESSURE SPUTTERING SYSTEM
HADA, T
WASA, K
HAYAKAWA, S
[J]. THIN SOLID FILMS, 1971, 7 (02) : 135 - &
[2] ITO L, 1983, JPN J APPL PHYS, V22, pL245
[3] HIGHLY TRANSPARENT AND CONDUCTING INDIUM-DOPED ZINC-OXIDE FILMS BY SPRAY PYROLYSIS
MAJOR, S
BANERJEE, A
CHOPRA, KL
[J]. THIN SOLID FILMS, 1983, 108 (03) : 333 - 340
[4] HIGHLY CONDUCTIVE AND TRANSPARENT ZINC-OXIDE FILMS PREPARED BY RF MAGNETRON SPUTTERING UNDER AN APPLIED EXTERNAL MAGNETIC-FIELD
MINAMI, T
NANTO, H
TAKATA, S
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (10) : 958 - 960
[5] HIGHLY CONDUCTIVE AND TRANSPARENT ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
NANTO, H
TAKATA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05): : L280 - L282
[6] THE STABILITY OF ZINC-OXIDE TRANSPARENT ELECTRODES FABRICATED BY RF MAGNETRON SPUTTERING
MINAMI, T
NANTO, H
SHOOJI, S
TAKATA, S
[J]. THIN SOLID FILMS, 1984, 111 (02) : 167 - 174
[7] GROUP-III IMPURITY DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
SATO, H
NANTO, H
TAKATA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (10): : L781 - L784
[8] Nakazawa T., 1983, Journal of the Vacuum Society of Japan, V26, P889, DOI 10.3131/jvsj.26.889
[9] ELECTRICAL AND OPTICAL-PROPERTIES OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FOR TRANSPARENT ELECTRODE APPLICATIONS
NANTO, H
MINAMI, T
SHOOJI, S
TAKATA, S
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 1029 - 1034
[10] ROTH AP, 1981, SOLID STATE COMM, V39, P1629

← 1 2 →