HYDROGEN IMPLANTATION INTO CVD AMORPHOUS-SILICON

被引：11

作者：

SUZUKI, T ^{[1
]}

HIROSE, M ^{[1
]}

OSAKA, Y ^{[1
]}

机构：

[1] HIROSHIMA UNIV,DEPT ELECT ENGN,HIROSHIMA 730,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1980年 / 19卷

关键词：

D O I：

10.7567/JJAPS.19S2.91

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：91 / 94

页数：4

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